Model Sampling Panel

The Model Sampling Panel lets the user set sampling values that are used in the simulation.

Sampling Variables

nhighna – The sampling used by the Optics object for High Numerical Aperature calculations.

nfrenel – The sampling used by the Optics object for Fresnel calculations.

nlowna – The sampling used by the Optics object for Low Numerical Aperature calculations.

nmlt – The sampling used by the Multilayer Target.

nmll – The sampling used by the Multilayer-Lithographic-Target.

Note:

It is often important for the specified sampling value to a power of 2! This is because the Fast Fourier Transform calculation is very fast for these values.