Illuminator Lens Panel

This option is chosen when the lens group describes either Kohler or Critical illumination on a target. This option must be used with a second lens group that describes the projection camera. The Illuminator Lens is used with Incoherent Source files.

Illuminator Type :

illuminator_panel.type

None – No Illuminator Lens is used (default). The sigma is ignored.

Kohler – This option assumes that the target (i.e., a lithographic mask) is placed in the exit pupil of the optical system. The source distribution is imaged into the entrance pupil of the projection camera. The incoherent source distribution is resized based on the entrance pupil diameter of the associated projection camera. The width of the source is resized so that its image fits within the projection camera entrance pupil. Changing sigma effectively apertures the source with an iris. sigma = (diameter of source image)/(entrance pupil diameter).

Critical – This option is not available with the current release.

The Projection/Illuminator Lens Portion :

The Projection Lens is the lens that images the illuminated mask target onto the final target.

illuminator_panel.pclensfile