Resources for Users

This page is a collection of often-used resources. As always, feel free to ask us questions. If you think we should add something to this page, let us know!

Datasheets for Common Resists

These documents contain information about things like process steps, resist storage, feature size, and dose recommendations.

• MaN
• S1813
• nLoF 2020/2035/2070
• PMMA
• ZEP
• AZ MiR 701
• HSQ
• SU-8

Guides

• How to convert an image to a DXF or GDS, including greyscale DXF.

Tool Metrics

• Takachi Etch Rate Data

Operating Instructions

WARNING: These instructions are for reference by trained users only. Do not attempt to operate complicated or dangerous tools without in-person training!

• Disco DAD Dicing Saw
• HMDS Adhesion Promoter
• Temescal Electron Beam Deposition