The OSC Micro/Nano Fabrication Cleanroom enables research in a dust-free, clean environment, utilizing state of the art lithography and deposition equipment.

The Cleanroom provides support for the University community, including researchers in the College of Science and College of Engineering. Additionally, the Cleanroom welcomes industry partners dedicated to research and development of solar, telecom, electronic and other technologies.


In order to comply with the OSHA Occupational Exposure to Hazardous Chemicals in Laboratories (29 CFR 1910.1450) regulations, laboratory specific training must be performed for every laboratory worker, either by the manager listed as the Approval Holder (Roland Himmelhuber) , or the Approval Safety Coordinator (Sasaan Showghi). This training, and the completion of the Chemical Safety Laboratory Specific Training Form, is required in addition to the General Chemical Safety Training. Training is available every Thursday at 2:00pm. Please email Roland Himmelhuber or Sasaan Showghi for confirmation. A @optics.arizona.edu email address is required for cleanroom access. Please contact helpdesk(at)optics.arizona.edu with the Subject “New Cleanroom User” to request one prior to requesting the labspecific safety training. To view cost for access please see here: Internal Costs Document (Under Mico/Nano Fabrication Cleanroom Section)

Four documents need to be submitted before access can be granted and equipment training can happen.