Cleanroom Policies & Checklist


  • The Cleanroom is to be used ONLY by those who have gone through the appropriate training and presented their certificate to Roland Himmelhuber. Users must provide a written statement from their supervisor verifying they have the training necessary to safely use the cleanroom. The documentation will be kept on file.
  • NO CHEMICALS SHALL BE TAKEN INTO THE CLEANROOM. If a different chemical is required, it is to be given to the Cleanroom Manager with the appropriate documentation, MATERIAL SAFETY DATA SHEET. 24 hours advance notice is required. Cleanroom Manager will determine if the chemical needs to be placed into a smaller container for proper handling.
  • The user is responsible for adding the chemical to the user dashboard at rgw.arizona.edu/compliance/RLSS.
  • If it is determined by the Cleanroom Manager that an individual is not qualified to work in the cleanroom, the Cleanroom Manager reserves the right to request that an individual leave the cleanroom.
  • OSC reserves the right to revoke Cleanroom privileges for failure to follow Cleanroom policies and procedures or for misuse of the Cleanroom facility.

OSC General Cleanroom Rules

These rules are designed to protect the integrity of the cleanroom, ensure general safety and adhere to the regulations of the Environmental Protection Agency (EPA). Observance of these rules is critical to the success of your research. Contamination can destroy both your research and the research of others. Failure to abide by these rules will result in disciplinary action commensurate with the severity of the infraction up to and including the loss of your cleanroom privileges.


  • Entry into the cleanroom is controlled and monitored with CatCard readers. DO NOT GIVE YOUR CARD TO ANYONE ELSE OR LET PEOPLE IN!
  • If you want to take someone in who is not an authorized user, you must get permission from the Cleanroom Manager.
  • The cleanroom is open during office hours Monday-Friday from 8 a.m.-5 p.m. In order to have access outside of these hours, permission must be obtained from the Cleanroom Manager. YOU ARE NOT AUTHORIZED TO WORK ALONE OUTSIDE OFFICE HOURS.

Sign Up

The purpose of having the Cleanroom Calendar to sign in is to facilitate efficient cleanroom operations. In order for this to work, several points must be observed. You will receive an email with instructions how to access the calendar.

  • Sign up is limited to 2 DAYS IN ADVANCE. Monday usage can be reserved on Thursday, likewise Tuesday on Friday.
  • There is a 3 hour limit per person per day per equipment The EBL is exempt from this. If you need a longer time period ask for permission from the Cleanroom Manager.
  • Only sign up for the amount of time that you need. i.e. don’t sign up for 3 hours if you only require 1 hour.
  • If you want to cancel your appointment do it as soon as possible. This will give other users a chance to fill the timeslot in question.
  • If after 15 minutes, you have not begun using the cleanroom, YOU FORFEIT YOUR ENTIRE TIMESLOT.
  • If you habitually fail to utilize the time period that you have requested, your sign up privileges will be revoked.

Foreign Objects in the Cleanroom

In order to keep the cleanroom clean, the number of items brought in from the outside must be kept to a minimum. All chemicals which are not already stocked in the cleanroom MUST BE BROUGHT TO the Cleanroom Manager 24 HOURS PRIOR TO ENTERING THE CLEANROOM.

  • Under no circumstances is loose-leaf paper to be brought in. Ziploc bags are provided in the gowning area in which to enclose paper, photocopies etc. RETURN THE BAGS TO THE SHELF WHEN YOU ARE FINISHED. Do not take them with you since they are for all cleanroom users
  • Cleanroom paper (yellow or blue 8.5″ by 11″) is provided on the shelves in the gowning area.
  • ALL PROCESSING SUPPLIES SHOULD BE LEFT IN THE CLEANROOM. There are lockers for such a purpose. Storing containers outside the cleanroom and then bringing them in cause’s unnecessary dust to enter the facility.
  • Nothing is to be brought into the cleanroom without going through the Cleanroom Manager. When new items must be brought into the cleanroom, they first must be wiped down. Leave the items in the gowning area, obtain a TechWipe cloth from the cleanroom (wet with Clean Room cleaner) and then wipe down the objects in the gowning area. This includes all new chemical bottles and glassware. Phones must be removed from their cases or put in zip-lock bags.


Cleanroom garments (suit and cap) are found in bins in gowning area. Write your name on the outside of your cap. Store your suit inside the cap.

  • Do not store your belongings (books, bags etc.) in the gowning area while you are in the cleanroom. Leave such items in your lab.
  • Do not enter the gowning area if your shoes are excessively dirty.
  • On the 7th floor keep your gown in a zip lock bag labeled with you name and user number. Store it in the cubby with your number.
  • On the 8th floor, keep your gown in a box with your name and put the lid on.

Gowning Procedure:

  1. Upon entering the gowning area, step on the first tack mat to remove the dust from the soles of your shoes. Do not step on the tack mats closest to the cleanroom doors with your street shoes.
  2. Locate your cleanroom garments. You have your own shelf in the cleanroom rack. Use a shelf indicated by your user number (first three digits in your access code). Return your suit to the correct shelf when you are finished.
  3. Put on hood and cap and your cleanroom suit; try to avoid dragging the arms and legs on the floor. Ensure that all of your hair is contained by the cap.
  4. Select shoe covers from the pegs on the wall. Once wearing the booties, do not step off the tack mats. Sit on the bench when putting on the boots and swing your legs over the bench once your boots are on. This way, cleanroom boots and street shoes are never in contact with the same floor area. If you have facial hair, you will be issued a mask to wear.
  5. WEAR GLOVES. Gloves prevent the oils on your hands from contaminating cleanroom surfaces and samples.

The Class 100 area (712A) has its own set of booties which will be located on a pegboard to your left. Otherwise, the gowning procedure is the same. It is required that you change boots when moving from the main cleanroom facility to the new Class 100 area. DO NOT WALK ACROSS THE CHANGING AREA IN CLEANROOM BOOTS.


Do not use a piece of equipment unless you have received proper training. If you are unsure about something, contact the Cleanroom Manager. Equipment surfaces are not for storing samples, components or tools.


General supplies (syringes, filters, common use glassware) are located in cabinets. Acids are stored in the acid lockers and other chemicals are stored in the yellow lockers.

  • Always return the supplies to their proper storage location when you are finished. DO NOT LEAVE CHEMICAL BOTTLES ON THE FLOOR IN THE CLEANROOM.
  • If you notice that an item is running low, report it to the Cleanroom Manager so the item can be restocked.
  • A number of groups have their own processing supplies and chemicals. All chemicals should be clearly labeled for the group in question. Chemicals have to be stored in proper chemical cabinets. All other supplies should be stored in toolboxes bearing group identification labels. DO NOT USE OTHER’S SUPPLIES. ANYONE CAUGHT USING ANOTHER GROUP’S SUPPLIES WILL HAVE THEIR ACCESS CODE IMMEDIATELY REVOKED.


  • NEVER RETURN UN-USED CHEMICALS TO THE SOURCE BOTTLE. Doing so will contaminate the entire supply.
  • After opening a new bottle, write the date on the label. This enables us to track usage and determine if an old chemical should be thrown out. Acetone and IPA are exempt.
  • Dispose used and un-used chemicals in an appropriate manner. See Waste Disposal procedures below.

Waste Disposal


  • Do not pour chemicals down the drain.
  • Do not mix waste chemical bottles. Empty bottles for waste storage can be found inside. With a thick marker, FULLY re-label the bottle indicating EXACTLY what will be placed in the bottle and clearly indicate that it is WASTE. Choose a bottle size compatible with the amount of waste that will be generated.
  • Store waste bottles in cabinets specially identified for them. If you can not find a bottle labeled for your waste, label an empty one.


  • If there is ANY chemical residue on the paper, place the waste in a sealed Ziploc bag before placing it in the garbage. There are red garbage bins for disposal of such items.


  • Cap off the end of the syringe and follow the same procedure as given above for paper.


  • Do not place the sheath on the needle. Deposit needles and glass in the sharps disposal container located in the Class 100 areas.


In order to keep contamination to a minimum, a weekly cleaning schedule has been adopted. Fridays from 3:00 to 5:00 the facility will be closed for cleaning.

  • Each week two of the users will be responsible for the cleaning.
  • Responsibilities include: vacuuming the floors, mopping the floors, pulling up the tack mats if necessary and wiping down wetbenches, tables, etc.
  • Responsibilities are listed as Weekly Cleaning Checklist. It is displayed on the Cleanroom Notice Board and is also found in the Gowning Room.
  • Each room has its own mop and bucket. DO NOT INTERCHANGE THESE CLEANING SUPPLIES.
  • There are 3 vacuum cleaners available on the 7th floor. The red one is meant for the gowning area. Two other vacuum cleaners are especially manufactured for cleanrooms. One of them is to be permanently kept at M712A (new Yellow Room). The other one is located in M712C. Do not take it out of this room. The 8th floor has one for the MA6 room (867), one for the clean side of the gowning are and the rest of 857 and one for the dirty siode of the gowning area.
  • Given the large number of cleanroom users, a user will be responsible for cleaning once every couple of months.


  • Remember also to follow the Addenda of these Cleanroom Rules. Everything is displayed on the Cleanroom Notice Board and also sent to you personally.

Addenda to CleanRoom Rules

Addendum #1

Important! Keep flammable substances away from the hotplates. Do not store or use squeeze bottles containing solvents near the hotplates.

Addendum #2

  • Sign the logbooks

Addendum #3

What happens if you violate Cleanroom or Safety Rules? In serious cases your cleanroom privileges may be permanently revoked. In less serious cases:

  • for the first time your code will be revoked for a month
  • for the second time your code will be revoked for two months i.e.
  • Successive violations may result in your Cleanroom privileges being revoked indefinitely.

Addendum #4

  • Do not store chemicals in Fume Hoods. Store them in their proper cabinets.

Addendum #5

Do not leave anything unattended. This concerns especially chemicals. If you have to leave something unattended:

  • Be sure that it is safe.
  • Leave a note identifying yourself and when you are going to pick up the item.
  • Place the item so that it does not disturb anyone else.

Addendum #6

  • Always use the boots by the doors to each cleanroom. Never keep your own pair on the 7th floor
  • Only use the boots in front of each cleanroom for that specific cleanroom. Never use boots from the class 10000 section in the new yellow room and vice versa.
  • If your cleanroom gown and/or cap gets dirty, or torn, throw it away and get a new one.

Addendum #7

Working with Acids

  • Working with acids is only allowed during the office hours.
  • Special permits are required to work with “Piranha”(mixture of Sulphuric Acid and Hydrogen Peroxide) or HF/Buffered Oxide Etch.
  • When etching with acids an acid apron should be worn at all times.
  • Protective eye wear should be worn at all times. The full face mask is preferred in case there is an acid splatter, your face will be more protected.
  • Acid gloves should be worn when working with acids. The acid gloves should not be worn when walking around the lab. When working with acids, the fumes and splatters can get on the gloves and then they are transferred to other equipment which is not good for the equipment or other operators.
  • Make sure that the latex gloves are pulled up over your cleanroom garment so that no skin is exposed. Then put on the acid gloves.
  • Do not sit.
  • Do not wear sandals.
  • Remove any watches or jewelry when working with acids since the fumes can destroy the finish from these items.

In the case of skin contact:

  • Take off contaminated clothes. Flush the skin with copious amounts of water for at least 15 minutes. Seek medical attention.

In the case of eye contact:

  • Flush contaminated eye(s) immediately with copious quantities of water for at least 15 minutes. Seek medical attention immediately.

In the case of inhalation:

  • Conscious persons should be assisted to an area with fresh, uncontaminated air. Seek medical attention in the event of respiratory irritation, cough, or tightness in the chest. Symptoms may be delayed.

Addendum #8

  • Learn the contents of the M712 Emergency Response Guide.

Addendum #9

  • When you start a new waste bottle, please remove any prior labeling from it. Labels from now on HAVE to made with cleanroom paper attached to the bottle.
    For photoresist developer please keep the different kinds separate (Don’t mix for example 351 with MF-319). Also please list the components and concentrations of the developer (can be found in the SDS, which you must have read before handling it).
    The same goes for other commercially available mixtures of other kinds, like etchants, as well as mixtures you might create yourself.
    Also, please keep solvents separate, for example 1 bottle for Acetone, one for IPA.
    At last, please write the date (month/year) and your name when you add waste, unless the current month is already shown. This goes for already used bottles, as well. The reason for this is to find out which half full bottles are not in use any more and can be disposed so they don’t take up space.
  • Updated: Roland Himmelhuber 31/08/17

Addendum #10

  • Protective eye wear is mandatory upon entering the facility and must be worn at all times. Corrective eye wear does NOT qualify as such.
  • Updated: Roland Himmelhuber 12/19/2018