Facilities

Etch

ICP-RIE DSE (Bosch etch)

  • Manufacturer: Plasmatherm
  • Model: Versaline DSE III
  • Gasses: CF4, Ar, C4F8, HCF3, SF6, O2, N2, H2
  • Interferometric and Spectroscopic end point detection
  • Helium back side cooling
  • Electrode temperature -20°C – +60°C
  • 150 mm wafers only – Si, SiO2 and Al2O3 carriers available

Chlorine etch with cryo/High Temp electrode

  • Manufacturer: Plasmatherm
  • Model: Takachi ICP LN
  • Gasses: CF4, Ar, HCF3, SF6, O2, N2, H2, CH4, BCl3, Cl2, HBr, He
  • Spectroscopic end point detection
  • Helium back side cooling
  • Electrode temperature -150°C – +350°C
  • 100 mm wafers only – Si, SiO2 and Al2O3 carriers available

Deposition

E-beam Evaporator

  • Manufacturer: Denton
  • Model: Mini Gun II
  • Materials: Indium

E-beam Evaporator

  • Manufacturer: Edwards
  • Model: Auto 306
  • Materials: No restrictions, typically user provided

E-beam Evaporator

  • Manufacturer: Temescal
  • Model: FC 2500 – up to 25 4″ wafer capacity with lift off dome
  • Materials: Au, Ti, Al, SiO2 , Pt, TaO5, Cr, Ni provided

PE-CVD

  • Manufacturer: Applied Materials
  • Model: P 5000 Mark II, 2 chambers, 6″ wafers
  • Materials: Silane based SiO2, silicon nitride and oxynitride

Sputter Coater

  • Manufacturer: Lesker
  • Materials: Au

Sputter Coater

  • Manufacturer: MTI
  • Model: Dual Head Magnetron
  • Materials: Au, Ti, Al, SiO2, Cr, Cu, Ag, ITO

Lithography

Electron Beam Lithography

  • Manufacturer: Elionix
  • Model: ELS-7000
  • Features: 6 nm Linewidth, Overlay accuracy <= 30nm, small pieces and up to 6 inch wafers and masks

Mask Aligner

  • Manufacturer: Karl Süss
  • Model: MA-6
  • Features: I-line, 500 nm resolution, contact and proximity mode

Mask Aligner

  • Manufacturer: Karl Süss
  • Model: MJB3
  • Features: UV-400, 1µm resolution

Mask Less Aligner

  • Manufacturer: Heidelberg Instruments
  • Model: MLA150
  • Features: 375 nm wavelength, 1µm linewidth, Overlay accuracy <=100nm

Inspection

  • Multiple optical microscopes up to 500X
  • Filmetrics Profilm3D – optical profiler/white light interferometer
  • Filmetrics F40 film thickness measurement tool

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  • Hitachi S-3400 N SEM

  • Veeco Innova AFM

  • Veeco Dektak 150 profilometer

Packaging

  • K&S Ball bonder (gold wire)
  • Hybond Wedgebonder (gold ribbon/wire)
  • Disco DAD 320 dicing saw
  • KrellTec FleX waveguide polisher
  • Accu-Seal clean room vacuum sealer

Miscellaneous

  • LatticeAx 225 indent and cleaving tool
  • Tousimis Autosamdri – 815 super critical dryer
  • Four spin coaters
  • Two flood exposure systems, one with inert gas chamber
  • Four ovens, multiple hotplates and ultra sonic baths
  • Two scales with 0.1 mg resolution
  • One scale with 0.01 g resolution
  • Newport waveguide characterization setup with pigtailing  capability