Development of Heterodyne Interferometer
- Optical configuration of the heterodyne interferometer adopts spatially separate two frequency beams to prevent frequency and polarization mixing, thus eliminates periodic errors
- Objective: design, build and experimentally verify
- Thermally stable,
- Compact,
- Interferometer without periodic error
- Application:
- Industry such as precise measurement of stage motion and machine control
- Scientific research such as space geodesy
- Results obtained:
- Achieved picometer-level displacement sensitivities in air over frequencies above 100 MHz.
- Verified higher sensitivity of 3 pm, higher thermal stability by a factor of two and periodic-error free performance
- Achieved short and long-term stabilities of the system during stationary and dynamic measurements
- Currently we are working on a single block interferometer and fiber interferometer
Researchers Involved:
Relevant Publications:
- A compact high-precision periodic-error-free heterodyne interferometer, J. Opt. Soc. Am. A 37, B11-B18 (2020) – Ki-Nam Joo, Erin Clark, Yanqi Zhang, Jonathan D. Ellis, and Felipe Guzmán