{"id":18,"date":"2017-07-31T15:33:29","date_gmt":"2017-07-31T22:33:29","guid":{"rendered":"https:\/\/live-optics-wp.pantheonsite.io\/osccleanroom\/?page_id=18"},"modified":"2025-07-21T10:43:44","modified_gmt":"2025-07-21T17:43:44","slug":"facilities","status":"publish","type":"page","link":"https:\/\/wp.optics.arizona.edu\/osccleanroom\/facilities\/","title":{"rendered":"Facilities"},"content":{"rendered":"<h3>Etch<\/h3>\n<h4>ICP-RIE DSE (Bosch etch)<\/h4>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-71 size-medium\" src=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2018\/12\/IMG_20181002_154437-1-e1544201663839-300x267.jpg\" alt=\"\" width=\"300\" height=\"267\" srcset=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2018\/12\/IMG_20181002_154437-1-e1544201663839-300x267.jpg 300w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2018\/12\/IMG_20181002_154437-1-e1544201663839-768x684.jpg 768w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2018\/12\/IMG_20181002_154437-1-e1544201663839-1024x912.jpg 1024w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/p>\n<ul>\n<li><strong>Manufacturer:<\/strong> Plasmatherm<\/li>\n<li><strong>Model:<\/strong> Versaline DSE III<\/li>\n<li><strong>Gasses:<\/strong> CF4, Ar, C4F8, HCF3, SF6, O2, N2, H2<\/li>\n<li>Interferometric and Spectroscopic end point detection<\/li>\n<li>Helium back side cooling<\/li>\n<li>Electrode temperature -20\u00b0C &#8211; +60\u00b0C<\/li>\n<li>150 mm wafers only &#8211; Si, SiO2 and Al2O3 carriers available<\/li>\n<\/ul>\n<h4>Chlorine etch with cryo\/High Temp electrode<\/h4>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-98\" src=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2021\/02\/PXL_20210215_182542148-225x300.jpg\" alt=\"\" width=\"236\" height=\"315\" data-id=\"98\" srcset=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2021\/02\/PXL_20210215_182542148-225x300.jpg 225w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2021\/02\/PXL_20210215_182542148-768x1024.jpg 768w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2021\/02\/PXL_20210215_182542148-1152x1536.jpg 1152w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2021\/02\/PXL_20210215_182542148-1536x2048.jpg 1536w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2021\/02\/PXL_20210215_182542148-scaled.jpg 1920w\" sizes=\"auto, (max-width: 236px) 100vw, 236px\" \/><\/p>\n<ul>\n<li><strong>Manufacturer:<\/strong> Plasmatherm<\/li>\n<li><strong>Model:<\/strong> Takachi ICP LN<\/li>\n<li><strong>Gasses:<\/strong> CF4, Ar, HCF3, SF6, O2, N2, H2, CH4, BCl3, Cl2, HBr, He<\/li>\n<li>Spectroscopic end point detection<\/li>\n<li>Helium back side cooling<\/li>\n<li>Electrode temperature -150\u00b0C &#8211; +350\u00b0C<\/li>\n<li>100 mm wafers only &#8211; Si, SiO2 and Al2O3 carriers available<\/li>\n<\/ul>\n<hr \/>\n<h3>Deposition<\/h3>\n<h4>E-beam Evaporator<\/h4>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-57\" src=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2017\/09\/IMG_20170908_100318-225x300.jpg\" alt=\"\" width=\"225\" height=\"300\" srcset=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2017\/09\/IMG_20170908_100318-225x300.jpg 225w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2017\/09\/IMG_20170908_100318-768x1024.jpg 768w\" sizes=\"auto, (max-width: 225px) 100vw, 225px\" \/><\/p>\n<ul>\n<li><strong>Manufacturer:<\/strong> Denton<\/li>\n<li><strong>Model:<\/strong> Mini Gun II<\/li>\n<li><strong>Materials:<\/strong> Indium<\/li>\n<\/ul>\n<h4>E-beam Evaporator<\/h4>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-56\" src=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2017\/09\/IMG_20170908_100409-225x300.jpg\" alt=\"\" width=\"225\" height=\"300\" srcset=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2017\/09\/IMG_20170908_100409-225x300.jpg 225w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2017\/09\/IMG_20170908_100409-768x1024.jpg 768w\" sizes=\"auto, (max-width: 225px) 100vw, 225px\" \/><\/p>\n<ul>\n<li><strong>Manufacturer:<\/strong> Edwards<\/li>\n<li><strong>Model:<\/strong>\u00a0Auto 306<\/li>\n<li><strong>Materials:<\/strong> No restrictions, typically user provided<\/li>\n<\/ul>\n<h4>E-beam Evaporator<\/h4>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-60\" src=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2017\/09\/IMG_20170908_100130-300x225.jpg\" alt=\"\" width=\"300\" height=\"225\" srcset=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2017\/09\/IMG_20170908_100130-300x225.jpg 300w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2017\/09\/IMG_20170908_100130-768x576.jpg 768w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2017\/09\/IMG_20170908_100130-1024x768.jpg 1024w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/p>\n<ul>\n<li><strong>Manufacturer:<\/strong> Temescal<\/li>\n<li><strong>Model:<\/strong> FC 2500 &#8211; up to 25 4&#8243; wafer capacity with lift off dome<\/li>\n<li><strong>Materials:<\/strong> Au, Ti, Al, SiO2 , Pt, Ag, Cr, Ni provided<\/li>\n<\/ul>\n<h4>PE-CVD<\/h4>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-121\" src=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2022\/09\/PXL_20220913_203112402-300x225.jpg\" alt=\"\" width=\"300\" height=\"225\" data-id=\"121\" srcset=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2022\/09\/PXL_20220913_203112402-300x225.jpg 300w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2022\/09\/PXL_20220913_203112402-1024x768.jpg 1024w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2022\/09\/PXL_20220913_203112402-768x576.jpg 768w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2022\/09\/PXL_20220913_203112402-1536x1152.jpg 1536w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2022\/09\/PXL_20220913_203112402-2048x1536.jpg 2048w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/p>\n<ul>\n<li><strong>Manufacturer:\u00a0<\/strong>Applied Materials<\/li>\n<li><strong>Model:\u00a0<\/strong>P 5000 Mark II, 2 chambers, 6&#8243; wafers<\/li>\n<li><strong>Materials:\u00a0<\/strong>Silane based SiO2, silicon nitride and oxynitride<\/li>\n<\/ul>\n<h4>Sputter Coater<\/h4>\n<ul>\n<li><strong>Manufacturer:<\/strong> Lesker<\/li>\n<li><strong style=\"font-size: 0.95em\">Materials:<\/strong><span style=\"font-size: 0.95em\"> Au<br \/>\n<\/span><\/li>\n<\/ul>\n<h4>Sputter Coater<\/h4>\n<ul>\n<li><strong>Manufacturer:<\/strong> MTI<\/li>\n<li><strong>Model:<\/strong> Dual Head Magnetron<\/li>\n<li><strong>Materials:<\/strong> Au, Ti, Al, SiO2, Cr, Cu, Ag, ITO and more<\/li>\n<\/ul>\n<hr \/>\n<h3>Lithography<\/h3>\n<h4>Electron Beam Lithography<\/h4>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-73\" src=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2018\/12\/IMG_20170908_100150-300x225.jpg\" alt=\"\" width=\"300\" height=\"225\" srcset=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2018\/12\/IMG_20170908_100150-300x225.jpg 300w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2018\/12\/IMG_20170908_100150-768x576.jpg 768w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2018\/12\/IMG_20170908_100150-1024x768.jpg 1024w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/p>\n<ul>\n<li><strong>Manufacturer:<\/strong> Elionix<\/li>\n<li><strong>Model:<\/strong> ELS-7000<\/li>\n<li><strong>Features:<\/strong> 6 nm Linewidth, Overlay accuracy &lt;= 30nm, small pieces and up to 6 inch wafers and masks<\/li>\n<\/ul>\n<h4>Mask Aligner<\/h4>\n<ul>\n<li><strong>Manufacturer:<\/strong> Karl S\u00fcss<\/li>\n<li><strong>Model:<\/strong> MA-6<\/li>\n<li><strong>Features:<\/strong> I-line, 500 nm resolution, contact and proximity mode<\/li>\n<\/ul>\n<h4>Mask Aligner<\/h4>\n<ul>\n<li><strong>Manufacturer:<\/strong> Karl S\u00fcss<\/li>\n<li><strong>Model:<\/strong> MJB3<\/li>\n<li><strong>Features:<\/strong> UV-400, 1\u00b5m resolution<\/li>\n<\/ul>\n<h4>Mask Less Aligner<\/h4>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-257\" src=\"http:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/07\/MLA-169x300.png\" alt=\"\" width=\"169\" height=\"300\" srcset=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/07\/MLA-169x300.png 169w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/07\/MLA.png 539w\" sizes=\"auto, (max-width: 169px) 100vw, 169px\" \/><\/p>\n<ul>\n<li><strong>Manufacturer:<\/strong> Heidelberg Instruments<\/li>\n<li><strong>Model:<\/strong> MLA150<\/li>\n<li><strong>Features:<\/strong> 375 nm wavelength, 1\u00b5m linewidth, Overlay accuracy &lt;=100nm<\/li>\n<\/ul>\n<hr \/>\n<h3>Inspection<\/h3>\n<ul>\n<li>Multiple optical microscopes up to 500X<\/li>\n<li>Filmetrics Profilm3D &#8211; optical profiler\/white light interferometer<\/li>\n<li>Filmetrics F40 film thickness measurement tool<\/li>\n<\/ul>\n<p>l<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-80\" src=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2019\/01\/IMG_20190128_110646-300x225.jpg\" alt=\"\" width=\"300\" height=\"225\" srcset=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2019\/01\/IMG_20190128_110646-300x225.jpg 300w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2019\/01\/IMG_20190128_110646-768x576.jpg 768w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2019\/01\/IMG_20190128_110646-1024x768.jpg 1024w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/p>\n<ul>\n<li>Hitachi S-3400 N SEM<\/li>\n<\/ul>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-85\" src=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2019\/03\/IMG_20190307_102020-300x225.jpg\" alt=\"\" width=\"300\" height=\"225\" srcset=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2019\/03\/IMG_20190307_102020-300x225.jpg 300w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2019\/03\/IMG_20190307_102020-768x576.jpg 768w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2019\/03\/IMG_20190307_102020-1024x768.jpg 1024w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/p>\n<ul>\n<li>Veeco Innova AFM<\/li>\n<\/ul>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-134\" src=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2023\/06\/PXL_20230606_174902782-225x300.jpg\" alt=\"\" width=\"225\" height=\"300\" srcset=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2023\/06\/PXL_20230606_174902782-225x300.jpg 225w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2023\/06\/PXL_20230606_174902782-768x1024.jpg 768w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2023\/06\/PXL_20230606_174902782-1152x1536.jpg 1152w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2023\/06\/PXL_20230606_174902782-1536x2048.jpg 1536w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2023\/06\/PXL_20230606_174902782-scaled.jpg 1920w\" sizes=\"auto, (max-width: 225px) 100vw, 225px\" \/><\/p>\n<ul>\n<li>Veeco Dektak 150 profilometer<\/li>\n<\/ul>\n<hr \/>\n<h3>Packaging<\/h3>\n<ul>\n<li>K&amp;S Ball bonder (gold wire)<\/li>\n<li>Hybond Wedge\/ball bonder, bumper (gold ribbon\/wire)<\/li>\n<li>Finetech Fineplacer Lambda die bonder<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-258\" src=\"http:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/07\/PXL_20250712_144025165-300x169.jpg\" alt=\"\" width=\"300\" height=\"169\" srcset=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/07\/PXL_20250712_144025165-300x169.jpg 300w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/07\/PXL_20250712_144025165-1024x576.jpg 1024w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/07\/PXL_20250712_144025165-768x432.jpg 768w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/07\/PXL_20250712_144025165-1536x864.jpg 1536w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/07\/PXL_20250712_144025165-2048x1152.jpg 2048w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/li>\n<li>Disco DAD 320 dicing saw<\/li>\n<li>KrellTec FleX waveguide polisher<\/li>\n<li>Fincontec fully automated pick and place system<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-259\" src=\"http:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/07\/PXL_20250712_143956751-300x169.jpg\" alt=\"\" width=\"300\" height=\"169\" srcset=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/07\/PXL_20250712_143956751-300x169.jpg 300w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/07\/PXL_20250712_143956751-1024x576.jpg 1024w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/07\/PXL_20250712_143956751-768x432.jpg 768w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/07\/PXL_20250712_143956751-1536x864.jpg 1536w, https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/07\/PXL_20250712_143956751-2048x1152.jpg 2048w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/li>\n<li>Accu-Seal clean room vacuum sealer<\/li>\n<\/ul>\n<hr \/>\n<h3>Miscellaneous<\/h3>\n<ul>\n<li>LatticeAx 225 indent and cleaving tool<\/li>\n<li>Tousimis Autosamdri &#8211; 815 super critical dryer<\/li>\n<li>Four spin coaters<\/li>\n<li>Two flood exposure systems, one with inert gas chamber<\/li>\n<li>Four ovens\/vacuum oven, multiple hotplates and ultra sonic baths<\/li>\n<li>Two scales with 0.1 mg resolution<\/li>\n<li>One scale with 0.01 g\u00a0resolution<\/li>\n<li>Newport waveguide characterization setup with pigtailing\u00a0 capability<\/li>\n<\/ul>\n","protected":false},"excerpt":{"rendered":"<p>Etch ICP-RIE DSE (Bosch etch) Manufacturer: Plasmatherm Model: Versaline DSE III Gasses: CF4, Ar, C4F8, HCF3, SF6, O2, N2, H2 Interferometric and Spectroscopic end point detection Helium back side cooling Electrode temperature -20\u00b0C &#8211; +60\u00b0C 150 mm wafers only &#8211; Si, SiO2 and Al2O3 carriers available Chlorine etch with cryo\/High Temp electrode Manufacturer: Plasmatherm Model: Takachi ICP LN Gasses: CF4,<\/p>\n","protected":false},"author":3,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-18","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-json\/wp\/v2\/pages\/18","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-json\/wp\/v2\/comments?post=18"}],"version-history":[{"count":32,"href":"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-json\/wp\/v2\/pages\/18\/revisions"}],"predecessor-version":[{"id":265,"href":"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-json\/wp\/v2\/pages\/18\/revisions\/265"}],"wp:attachment":[{"href":"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-json\/wp\/v2\/media?parent=18"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}