{"id":140,"date":"2023-10-04T11:14:17","date_gmt":"2023-10-04T18:14:17","guid":{"rendered":"https:\/\/live-optics-wp.pantheonsite.io\/osccleanroom\/?page_id=140"},"modified":"2026-03-17T13:36:09","modified_gmt":"2026-03-17T20:36:09","slug":"resources-for-users","status":"publish","type":"page","link":"https:\/\/wp.optics.arizona.edu\/osccleanroom\/resources-for-users\/","title":{"rendered":"Resources for Users"},"content":{"rendered":"\r\n<p>This page is a collection of often-used resources. As always, feel free to ask us questions. If you think we should add something to this page, let us know!<\/p>\r\n<h3>Datasheets for Common Resists<\/h3>\r\n<p>These documents contain information about things like process steps, resist storage, feature size, and dose recommendations.<\/p>\r\n<ul>\r\n<li><a href=\"http:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2026\/03\/PG_ma-N-2400_series-4.pdf\">MaN<\/a><\/li>\r\n<li><a href=\"http:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/10\/Dow-S1800_TDS_Eng.pdf\">S1813<\/a><\/li>\r\n<li><a href=\"http:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2024\/09\/tds_az_nlof2000_series.pdf\">nLoF 2020\/2035\/2070<\/a><\/li>\r\n<li><a href=\"http:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2024\/09\/PMMA_Data_Sheet.pdf\">PMMA<\/a><\/li>\r\n<li><a href=\"http:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2024\/09\/zep520a-7-2.pdf\">ZEP<\/a><\/li>\r\n<li><a href=\"http:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2024\/09\/tds_az_mir701_series.pdf\">AZ MiR 701<\/a><\/li>\r\n<li><a href=\"http:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2024\/09\/EM-Resist-HSQ-Datasheet.pdf\">HSQ<\/a><\/li>\r\n<li><a href=\"http:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2024\/09\/KAM-SU-8-2-25-Datasheet-9.3.20-final.pdf\">SU-8<\/a><\/li>\r\n<\/ul>\r\n<h3>Guides<\/h3>\r\n<ul>\r\n<li><a href=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/user_uploads\/jrchamberlain\/image_to_dxf-gds.pdf\">How to convert an image to a DXF or GDS, including greyscale DXF<\/a><\/li>\r\n<li><a href=\"http:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2024\/07\/versaline_transfer.mp4\">Versaline wafer transfer video<\/a><\/li>\r\n<li><a href=\"http:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2024\/08\/how_to_calendar.pdf\">How to create a tool scheduling system<\/a><\/li>\r\n<li><a href=\"http:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/08\/Large_samples.pdf\">How to load a large sample into the Temescal evaporator<\/a><\/li>\r\n<\/ul>\r\n<h3>Tool Metrics<\/h3>\r\n<ul>\r\n<li><a href=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/user_uploads\/jrchamberlain\/Takachi_Etch_Data.pdf\">Takachi Etch Rate Data<\/a><\/li>\r\n<\/ul>\r\n<h3>Operating Instructions<\/h3>\r\n<p><strong><span style=\"color: #ff0000\">WARNING:<\/span><\/strong> These instructions are for reference by trained users only. <strong>Do not<\/strong> attempt to operate complicated or dangerous tools without in-person training!<\/p>\r\n<ul>\r\n<li><a href=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/user_uploads\/jrchamberlain\/Disco-Dicing-Saw-Instructions.pdf\">Disco DAD Dicing Saw<\/a><\/li>\r\n<li><a href=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/user_uploads\/jrchamberlain\/HMDS_SOP.pdf\">HMDS Adhesion Promoter<\/a><\/li>\r\n<li><a href=\"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/user_uploads\/jrchamberlain\/Temescal_SOP_v2.pdf\">Temescal Electron Beam Deposition<\/a><\/li>\r\n<li><a href=\"http:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/07\/Disco-Dicing-Saw-Instructions.pdf\">Disco DAD 320 dicing saw<\/a><\/li>\r\n<li><a href=\"http:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/07\/Plasma-Cleaner-instructions-.pdf\">Plasmapreen O2 cleaner 8th floor<\/a><\/li>\r\n<li><a href=\"http:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-content\/uploads\/sites\/66\/2025\/09\/SOP.pdf\">P5000 PE-CVD<\/a><\/li>\r\n<\/ul>\r\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":262,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-140","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-json\/wp\/v2\/pages\/140","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-json\/wp\/v2\/users\/262"}],"replies":[{"embeddable":true,"href":"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-json\/wp\/v2\/comments?post=140"}],"version-history":[{"count":40,"href":"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-json\/wp\/v2\/pages\/140\/revisions"}],"predecessor-version":[{"id":285,"href":"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-json\/wp\/v2\/pages\/140\/revisions\/285"}],"wp:attachment":[{"href":"https:\/\/wp.optics.arizona.edu\/osccleanroom\/wp-json\/wp\/v2\/media?parent=140"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}