Hendricks, Douglas R.

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Employer
KLA Instruments
Degree, Semester & Year Graduated (1)
MS; Spring; 1987
Adviser(s)
Gibbs, Hyatt M.
Report/Thesis/Dissertation Title 1
Reactive Ion Etching of Gallium Arsenide and Aluminum Gallium Arsenide Using Boron Trichloride and Chlorine